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Quantitative analysis of total reflection X-ray fluorescence from finely layered structures using XeRay.

Rev Sci Instrum 2017 Mar;88(3):033112

James Franck Institute, The University of Chicago, Chicago, Illinois 60637, USA.

Total reflection x-ray fluorescence (TXRF) is a widely applicable experimental technique for studying chemical element distributions across finely layered structures at extremely high sensitivity. To promote and facilitate scientific discovery using TXRF, we developed a MATLAB-based software package with a graphical user interface, named XeRay, for quick, accurate, and intuitive data analysis. XeRay lets the user model any layered system, each layer with its independent chemical composition and thickness, and enables fine-tuned data fitting. Read More

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