Adv Mater 2021 Mar 30:e2008644. Epub 2021 Mar 30.
Institute of Nanotechnology - Nanotec, Consiglio Nazionale delle Ricerche, Ponte P. Bucci - Cubo 33C, Rende, 87036, Italy.
A novel technique is developed to improve the resolution of two-photon direct laser writing lithography. Thanks to the high collimation enabled by extraordinary ε (near-zero) metamaterial features, ultrathin dielectric hyper-resolute nanostructures are within reach. With respect to the standard direct laser writing approach, a size reduction of 89% and 50%, in height and width respectively, is achieved with the height of the structures adjustable between 5 and 50 nm. Read More