ACS Nano 2017 10 2;11(10):10384-10391. Epub 2017 Oct 2.
California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Pediatrics, David Geffen School of Medicine, ∥Eli and Edythe Broad Center of Regenerative Medicine and Stem Cell Research, ⊥Children's Discovery and Innovation Institute, and #Department of Materials Science and Engineering, University of California, Los Angeles , Los Angeles, California 90095, United States.
While three-dimensional (3D) configurable hierarchical nanostructures have wide ranging applications in electronics, biology, and optics, finding scalable approaches remains a challenge. We report a robust and general strategy called multiple-patterning nanosphere lithography (MP-NSL) for the fabrication of periodic 3D hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of polymer nanospheres that serve as resists and that can be shaped in parallel for each processing step. Read More