Micromachines (Basel) 2021 Feb 5;12(2). Epub 2021 Feb 5.
Institute for Microsystems Technology (IMST), Department of Mechanical & Medical Engineering, Furtwangen University of Applied Science, D-78120 Furtwangen, Germany.
Adaptive optical (AO) components play an important role in numerous optical applications, from astronomical telescopes to microscope imaging systems. For most of these AO components, the induced wavefront correction, respectively added optical power, is based on a rotationally symmetric or segmented design of the AO component. In this work, we report on the design, fabrication, and characterization of a micro-electronic-mechanical system (MEMS) adaptive membrane mirror in the shape of a parabolic cylinder. Read More