Adv Sci (Weinh) 2022 07 18;9(21):e2201056. Epub 2022 May 18.
Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117583, Singapore.
Current noncontact human-machine interfaces (HMIs) either suffer from high power consumption, complex signal processing circuits, and algorithms, or cannot support multidimensional interaction. Here, a minimalist, low-power, and multimodal noncontact interaction interface is realized by fusing the complementary information obtained from a microelectromechanical system (MEMS) humidity sensor and a triboelectric sensor. The humidity sensor composed of a two-port aluminum nitride (AlN) bulk wave resonator operating in its length extensional mode and a layer of graphene oxide (GO) film with uniform and controllable thickness, possesses an ultra-tiny form factor (200 × 400 µm ), high signal strength (Q = 1729. Read More