Nanotechnology 2019 Dec 2;30(49):495702. Epub 2019 Sep 2.
Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea. Samsung Display Company, Ltd, 181 Samsung-ro, Tangjeong-myeon, Asan-si, Chungcheongnam-Do, Republic of Korea.
We present an atmospheric-pressure plasma (APP) treatment technique to improve the electrical performance of solution-processed dielectric films. This technique can successfully reduce leakage current and frequency dependence of solution-processed dielectric films. The APP treatment contributes to the conversion of metal hydroxide to metal oxide, and in the case of a solution-treated AlO dielectric thin film, it effectively ascribes to the formation of high-quality AlO dielectric thin films. Read More