A long-range plasmonic optical waveguide corner mirror chip

Overview

We present a fabrication method to integrate the waveguide corner mirror based on self-alignment of multiple lithography steps.

Resources

https://www.sciencedirect.com/science/article/pii/S2590007220300046
https://www.sciencedirect.com/science/article/pii/S2590007220300046

A long-range plasmonic optical waveguide corner mirror chip

Micro and Nano Engineering

MARKEY2020100049

We provide the experimental proof of concept of on-chip 90° corner waveguide arrays based on ultra-long-range surface plasmon polariton waveguides working in TM-polarization at 1.55 μm. The single-mode waveguides comprise a thin gold-photoresist core embedded into SU-8 claddings and show typical propagation loss of ~1 dB/mm. A prismatic cavity integrated into the cladding layers and aligned with the waveguide's corner assures the total internal reflection. We present a fabrication method to integrate the waveguide corner mirror based on self-alignment of multiple lithography steps. This chip has potential as low-loss perpendicular interface for single-mode high speed communication interconnects.
June 2020
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