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Nanoscopic cylindrical dual concentric and lengthwise block brush terpolymers as covalent preassembled high-resolution and high-sensitivity negative-tone photoresist materials.

Authors:
Guorong Sun Sangho Cho Corrie Clark Stanislav V Verkhoturov Michael J Eller Ang Li Adriana Pavía-Jiménez Emile A Schweikert James W Thackeray Peter Trefonas Karen L Wooley

J Am Chem Soc 2013 Mar 12;135(11):4203-6. Epub 2013 Mar 12.

Department of Chemistry, Texas A&M University, College Station, Texas 77842, USA.

We describe a high-resolution, high-sensitivity negative-tone photoresist technique that relies on bottom-up preassembly of differential polymer components within cylindrical polymer brush architectures that are designed to align vertically on a substrate and allow for top-down single-molecule line-width imaging. By applying cylindrical diblock brush terpolymers (DBTs) with a high degree of control over the synthetic chemistry, we achieved large areas of vertical alignment of the polymers within thin films without the need for supramolecular assembly processes, as required for linear block copolymer lithography. The specially designed chemical compositions and tuned concentric and lengthwise dimensions of the DBTs enabled high-sensitivity electron-beam lithography of patterns with widths of only a few DBTs (sub-30 nm line-width resolution). The high sensitivity of the brush polymer resists further facilitated the generation of latent images without postexposure baking, providing a practical approach for controlling acid reaction/diffusion processes in photolithography.

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http://dx.doi.org/10.1021/ja3126382DOI Listing
March 2013

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Nanoscopic cylindrical dual concentric and lengthwise block brush terpolymers as covalent preassembled high-resolution and high-sensitivity negative-tone photoresist materials.

Authors:
Guorong Sun Sangho Cho Corrie Clark Stanislav V Verkhoturov Michael J Eller Ang Li Adriana Pavía-Jiménez Emile A Schweikert James W Thackeray Peter Trefonas Karen L Wooley

J Am Chem Soc 2013 Mar 12;135(11):4203-6. Epub 2013 Mar 12.

Department of Chemistry, Texas A&M University, College Station, Texas 77842, USA.

We describe a high-resolution, high-sensitivity negative-tone photoresist technique that relies on bottom-up preassembly of differential polymer components within cylindrical polymer brush architectures that are designed to align vertically on a substrate and allow for top-down single-molecule line-width imaging. By applying cylindrical diblock brush terpolymers (DBTs) with a high degree of control over the synthetic chemistry, we achieved large areas of vertical alignment of the polymers within thin films without the need for supramolecular assembly processes, as required for linear block copolymer lithography. The specially designed chemical compositions and tuned concentric and lengthwise dimensions of the DBTs enabled high-sensitivity electron-beam lithography of patterns with widths of only a few DBTs (sub-30 nm line-width resolution). Read More

View Article and Full-Text PDF
March 2013
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MOLECULAR STRUCTURE OF PLANT FIBERS DETERMINED BY X-RAYS.

Authors:
O L Sponsler

J Gen Physiol 1926 May;9(5):677-95

University of California, Southern Branch, Los Angeles.

It has been shown that the wall of the plant fiber is probably built up of unit groups of atoms which have assumed the form of a space lattice. The elementary cell of the lattice is an orthorhombic structure with the dimensions 6.10 x 5. Read More

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May 1926
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Authors:
O L Sponsler

J Gen Physiol 1925 Nov;9(2):221-33

University of California, Southern Branch, Los Angeles.

The rather long discussion just given seemed necessary in order to establish certain points before attempting to develop the lattice structure and before working out the identity of the structural unit of the ramie fiber. 1. Certain planes, 6. Read More

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