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Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Authors:
Madhu Santosh Ku Mutyala Deepika Bandhanadham Liu Pan Vijaya Rohini Pendyala Hai-Feng Ji

Acta Mech Sin 2009 Feb;25(1):1-12

Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA.

Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free biosensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of microcantilever (MCL) sensors.

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http://dx.doi.org/10.1007/s10409-008-0222-6DOI Listing
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC2958108PMC
February 2009

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