Publications by authors named "Shuiquan Pang"

3 Publications

  • Page 1 of 1

A robust edge-based template matching algorithm for displacement measurement of compliant mechanisms under scanning electron microscope.

Rev Sci Instrum 2021 Mar;92(3):033703

Guangdong Key Laboratory of Precision Equipment and Manufacturing Technology, South China University of Technology, Guangzhou 510640, People's Republic of China.

This paper develops a robust edge-based template matching algorithm for displacement measurement of compliant mechanisms under a scanning electron microscope (SEM). The algorithm consists of three steps. First, the Sobel gradient operator and a self-adaptive segment strategy are used to establish the shape model in which the gradient directions of the object's edge points are calculated. Second, a similarity criterion based on image gradients that is robust to illumination change and image noise is utilized for template matching to obtain the coarse results. The third step is to refine the matching results by using an orientation-guided subpixel interpolation strategy. A series of simulations is conducted, and the results show that the proposed algorithm enjoys great robustness against strong image noise and gray-value fluctuation, as well as small rotations and background interferences, and thus is suitable for processing SEM images of compliant mechanisms. Finally, the application of the proposed algorithm in the measurement of the spring constant of the flexure hinges with a straight beam form under a SEM is demonstrated.
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http://dx.doi.org/10.1063/5.0023244DOI Listing
March 2021

Motion measurement system of compliant mechanisms using computer micro-vision.

Opt Express 2021 Feb;29(4):5006-5017

Position sensing is essential to testify the validity of the mechanical design and verify the performance in micromanipulation. A practical system for non-contact micro-motion measurement of compliant nanopositioning stages and micromanipulators is proposed using computer micro-vision. The micro-motion measurement method integrates optical microscopy and an optical flow-based technique, in which the motions of complaint mechanisms are precisely detected and measured. Simulations are carried out to validate the robustness of the proposed method, while the micro-vision system and a laser interferometer measurement system are also built up for a series of experiments. The experimental results demonstrate that the proposed measurement system possesses high stability, extensibility, and precision with 0.06 µm absolute accuracy and 0.05 µm standard deviation.
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http://dx.doi.org/10.1364/OE.415097DOI Listing
February 2021

A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems.

Rev Sci Instrum 2019 May;90(5):053706

Guangdong Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, People's Republic of China.

Calibration for scanning electron microscope (SEM) based nanorobotic manipulation systems is important and difficult. Most current calibration methods are cumbersome because they require customized high precision calibration boards and repeated calibration procedures in different magnifications. This paper presents a convenient magnification-continuous calibration method with high precision for SEM-based nanorobotic manipulation systems. The projection matrix containing a continuous magnification factor is obtained by modifying the affine camera model. This facilitates the simplification of the parameter computing process. Movement features are used to align the moving axes of micropositioning stages and calibrate the system, which benefits for the realization of efficient automatic calibration. Three experiments are carried out, and the results demonstrate that the proposed method is effective and practical for calibrating SEM-based nanorobotic manipulation systems under a wide range of continuous magnifications. Experiments also confirm that high precision measurements can be conducted in different magnifications with only once calibration and the relative error is within 1%.
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http://dx.doi.org/10.1063/1.5086940DOI Listing
May 2019