Publications by authors named "Joris Sturm"

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The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication.

Beilstein J Nanotechnol 2021 6;12:304-318. Epub 2021 Apr 6.

Corelab Correlative Microscopy and Spectroscopy, Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany.

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.
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http://dx.doi.org/10.3762/bjnano.12.25DOI Listing
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8042487PMC
April 2021
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